비냉각 적외선 센서 제작을 위한 스파타링 방법에 의한 PZT 박막형성 및 식각특성 평가

Authors
Oh, Young Jei
Issue Date
1999-11-19
Citation
제 10회 적외선 영상센서 Conference, pp.0
URI
https://pubs.kist.re.kr/handle/201004/84867
Appears in Collections:
KIST Conference Paper > Others
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