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Internal antenna를 이용한 Inductively coupled plasma내에서 발생된 이온의 존재 비율 측정

Authors

LEE, YEON HEE

Issue Date

1999-02-01

Citation

한국진공학회, pp.0

URI

https://pubs.kist.re.kr/handle/201004/84947

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KIST Conference Paper > Others

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