Internal antenna를 이용한 Inductively coupled plasma내에서 발생된 이온의 존재 비율 측정

Authors
LEE, YEON HEE
Issue Date
1999-02-01
Citation
한국진공학회, pp.0
URI
https://pubs.kist.re.kr/handle/201004/84947
Appears in Collections:
KIST Conference Paper > Others
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