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전자빔　리소그래피　장치　및　이를　이용한　다층　정렬　방법

Author

김회종; 강광남; 이정일; 이명복; 최원준; 이유종; 한일기

Assignee

한국과학기술연구원

Regitration Date

1997-12-11

Registration No.

132539

Application Date

1994-06-01

Application No.

94-12262

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85077

Appears in Collections:

KIST Patent > Others

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