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dc.contributor.author이임걸-
dc.contributor.author김정식-
dc.contributor.author김신근-
dc.date.accessioned2024-01-12T11:02:06Z-
dc.date.available2024-01-12T11:02:06Z-
dc.date.issued1998-06-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/85103-
dc.title무패턴　기판　결함　자동검색장치　및　그　검색방법-
dc.typePatent-
dc.date.registration1998-06-29-
dc.date.application1995-04-14-
dc.identifier.patentRegistrationNumber152582-
dc.identifier.patentApplicationNumber95-8802-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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