KIST Library Institutional Repository

반도체　패턴　측면의　에피성장율　조절방법

Author

민석기; 김용; 김무성

Assignee

한국과학기술연구원

Regitration Date

1998-09-01

Registration No.

162865

Application Date

1995-03-09

Application No.

95-4793

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/85121

Appears in Collections:

KIST Patent > Others

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