게이트의 미세구조 패시베이션에 의한전계효과트랜지스터의 성능 개선방법

Author
민석기황성우김은규
Assignee
한국과학기술연구원
Regitration Date
1998-12-05
Registration No.
181254
Application Date
1996-05-13
Application No.
96-15768
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/85146
Appears in Collections:
KIST Patent > Others
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