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Reduced Al-Ga Interdiffusion in GaAs/AlGaAs Multiple Quantum Well Structure by Introducing Low Hydrogen Content SiNx Capping Layer for Dielectric Cap Quantum Well Disordering

Authors

Choi, Won Jun; Lee, Seok

Issue Date

1998-10-18

Citation

, pp.1 - 0

URI

https://pubs.kist.re.kr/handle/201004/85367

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KIST Conference Paper > Others

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