DSpace at KIST: Electrical properties of e-beam exposed silicon dioxides and their application to nano-devices

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Electrical properties of e-beam exposed silicon dioxides and their application to nano-devices

Authors: Choi, B.H.; Jung, S.K.; Kim, S.I.; Hwang, S.W.; Park, J.H.; Kim, Y.; Kim, E.K.; Min, S.-K.

Issue Date: 1998-07

Publisher: Institute of Electrical and Electronics Engineers

Citation: 1998 International Microprocesses and Nanotechnology Conference, MNC 1998, pp.206 - 207

Abstract: [No abstract available]

ISSN: 0000-0000

URI: https://pubs.kist.re.kr/handle/201004/85390

DOI: 10.1109/IMNC.1998.730046

Appears in Collections:: KIST Conference Paper > Others

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