KIST Library Institutional Repository

Controls of crystallinity and surface roughness of Cu film in partially ionized beam deposition

Authors

CHOI, WON KOOK

Issue Date

1996-11-01

Citation

미국재료학회, pp.581 - 585

URI

https://pubs.kist.re.kr/handle/201004/85894

Appears in Collections:

KIST Conference Paper > Others

Files in This Item:

There are no files associated with this item.

Export

RIS (EndNote)

XLS (Excel)

XML