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dc.contributor.author김낙중-
dc.contributor.author박수영-
dc.contributor.author김은영-
dc.contributor.author홍성일-
dc.contributor.authorHiroyuki Sasabe-
dc.date.accessioned2015-12-02T03:03:58Z-
dc.date.available2015-12-02T03:03:58Z-
dc.date.issued199001-
dc.identifier.citationv. 22, no. 3, 242-249-
dc.identifier.other1714-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/8592-
dc.publisherPolymer journal-
dc.subjectplasma polymerization-
dc.subjectplasma deposition-
dc.subjectglow discharge-
dc.subjectorganosilicon-
dc.titlePlasma polymerization of hexamethyldisilazane.-
dc.typeArticle-
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