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TEM studies of plasma deposited tungsten and tungsten nitride barriers for thermally stable metallization

Authors

Kim, Yong Tae

Issue Date

1994-07-01

Citation

Material Res. Soc. Symp.Proc, pp.335 - 340

URI

https://pubs.kist.re.kr/handle/201004/86029

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KIST Conference Paper > Others

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