TEM studies of plasma deposited tungsten and tungsten nitride barriers for thermally stable metallization

Authors
Kim, Yong Tae
Issue Date
1994-07-01
Citation
Material Res. Soc. Symp.Proc, pp.335 - 340
URI
https://pubs.kist.re.kr/handle/201004/86029
Appears in Collections:
KIST Conference Paper > Others
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