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dc.contributor.authorBae, Gwi Nam-
dc.date.accessioned2024-01-12T11:41:50Z-
dc.date.available2024-01-12T11:41:50Z-
dc.date.created2022-01-14-
dc.date.issued1994-01-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/86051-
dc.title수직 웨이퍼상의 입자 침착속도의 측정-
dc.typeConference-
dc.description.journalClass2-
dc.identifier.bibliographicCitation, pp.149 - 153-
dc.citation.startPage149-
dc.citation.endPage153-
dc.relation.isPartOf1994년도 공기조화.냉공공학회 하계학술발표회 강연 및 논문집-
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