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변형된 저마늄을 포함하는 반도체 소자의 제조 방법 및 이에 의해 제조된 반도체 소자

Author

김형준; 김상현; 임희정; 김연수; 심재필

Assignee

한국과학기술연구원

Regitration Date

2019-12-10

Registration No.

10504771

Application Date

2017-01-26

Application No.

15/416727

Country

US

URI

https://pubs.kist.re.kr/handle/201004/86197

Appears in Collections:

KIST Patent > 2017

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