KIST Library Institutional Repository

화학적 기계적 연마 패드 컨디셔너 및 그 제조방법

Author

백영준; 이욱성; 박종극

Assignee

한국과학기술연구원

Regitration Date

2012-09-06

Registration No.

1182187

Application Date

2011-12-15

Application No.

2011-0135060

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/86800

Appears in Collections:

KIST Patent > 2011

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