복합 유전체 박막과, 이를 이용한 캐패시터 및 전계 효과 트랜지스터와, 이들 각각의 제조 방법

Author
김일두송용원김호기김동훈
Assignee
한국과학기술연구원
Regitration Date
2011-05-25
Registration No.
1038238
Application Date
2008-07-02
Application No.
2008-0064112
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/87019
Appears in Collections:
KIST Patent > 2008
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