DSpace at KISTKIST Patent2008

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dc.contributor.author이상렬-
dc.contributor.author강종윤-
dc.contributor.author장호원-
dc.contributor.author임재현-
dc.date.accessioned2024-01-12T12:37:13Z-
dc.date.available2024-01-12T12:37:13Z-
dc.date.issued2010-12-01-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87023-
dc.title유전체 장벽 방전을 이용한 펄스 레이저 증착장치 및 방법 그리고 이에 의해 형성된 금속 산화물 박막-
dc.typePatent-
dc.date.registration2010-12-01-
dc.date.application2008-07-11-
dc.identifier.patentRegistrationNumber10-0999013-
dc.identifier.patentApplicationNumber2008-0067793-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2008
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