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3-dimentional imaging method for sample loading system in AirSEM

Other Titles

AirSEM에서 초근접 샘플 로딩 시스템을 위한 3차원 이미징 방법

Authors

Selotkin Vladyslav; Tsyba Yevhen; Kwak Kisung; Park, Min-Chul

Publisher

한국 방송·미디어 공학회, 2.7~9, 제주

Citation

영상처리 및 이해에 관한 워크샵

Keywords

AirSEM; Confocal; 3D imaging; nano

URI

https://pubs.kist.re.kr/handle/201004/87265

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KIST Conference Paper > Others

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