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펄스 플라즈마 방전에 의한 박막 증착방법

Author

김용태; 심현상; 이창우; 김성일

Assignee

한국과학기술연구원

Regitration Date

2004-10-26

Registration No.

0455753

Application Date

2002-04-08

Application No.

2002-0019017

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/87533

Appears in Collections:

KIST Patent > 2002

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