DSpace at KISTKIST Patent2002

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dc.contributor.author김용태-
dc.contributor.author심현상-
dc.contributor.author이창우-
dc.contributor.author김성일-
dc.date.accessioned2024-01-12T13:06:14Z-
dc.date.available2024-01-12T13:06:14Z-
dc.date.issued2004-10-26-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87533-
dc.title펄스 플라즈마 방전에 의한 박막 증착방법-
dc.typePatent-
dc.date.registration2004-10-26-
dc.date.application2002-04-08-
dc.identifier.patentRegistrationNumber0455753-
dc.identifier.patentApplicationNumber2002-0019017-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2002
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