디렉트 모니터링 전기로를 이용한 수직온도 구배 냉각 화합물 반도체 단결정 성장장치

Author
민석기박승철심광보박용주한철원
Assignee
한국과학기술연구원
Regitration Date
1992-08-04
Registration No.
5,135,726
Application Date
1991-03-20
Application No.
07/672,563
Country
US
URI
https://pubs.kist.re.kr/handle/201004/87885
Appears in Collections:
KIST Patent > Others
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