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dc.contributor.author민석기-
dc.contributor.author김용태-
dc.date.accessioned2024-01-12T13:32:08Z-
dc.date.available2024-01-12T13:32:08Z-
dc.date.issued1996-01-30-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87937-
dc.title실리콘　반도체소자의　금속배선　형성용텅스텐　질화　박막증착방법-
dc.typePatent-
dc.date.registration1996-01-30-
dc.date.application1993-11-23-
dc.identifier.patentRegistrationNumber5,487,923-
dc.identifier.patentApplicationNumber08/155,915-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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