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dc.contributor.author민석기-
dc.contributor.author김용-
dc.contributor.author김성일-
dc.contributor.author김무성-
dc.date.accessioned2024-01-12T13:33:28Z-
dc.date.available2024-01-12T13:33:28Z-
dc.date.issued1997-07-15-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/87995-
dc.title화학증착장치용　히터-
dc.typePatent-
dc.date.registration1997-07-15-
dc.date.application1995-02-09-
dc.identifier.patentRegistrationNumber5,648,006-
dc.identifier.patentApplicationNumber08/385,968-
dc.publisher.countryUS-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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