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결정의존성　습식식각을　이용하여　제조된　실리콘　팁　및　그　제조방법

Author

주병권; 이윤희; 오명환

Assignee

한국과학기술연구원

Regitration Date

1998-05-21

Registration No.

148067

Application Date

1995-04-15

Application No.

95-8890

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/88004

Appears in Collections:

KIST Patent > Others

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