KIST Library Institutional Repository

반도체　패턴　측면의　에피성장율　조절방법

Author

민석기; 김용; 김무성

Assignee

한국과학기술연구원

Regitration Date

1999-03-30

Registration No.

5,888,294

Application Date

1996-03-01

Application No.

08/609,323

Country

US

URI

https://pubs.kist.re.kr/handle/201004/88006

Appears in Collections:

KIST Patent > Others

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