N-치환된 술폰일옥시말레이미드 단량체를 이용한 삼원공중합체의 제조방법 및 그를 이용한 내열성 레지스트..

Author
안광덕강종희구덕일정찬문
Assignee
한국과학기술연구원
Regitration Date
1998-04-29
Registration No.
145353
Application Date
1994-08-13
Application No.
94-20036
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/88011
Appears in Collections:
KIST Patent > Others
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