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Synthesis of large area MoS2 few layers by RF sputtering process

Authors

OH TAEKYUNG; Hyunsu Ju; Hyengtag Jeon; Lee, Jeon Kook

Publisher

Materials Research Society, 4.17~21, Arizona

Citation

2017 MRS Spring Meeting

Keywords

MoS2; 2 dimensional materials; off axis sputtering; epitaxial growth

URI

https://pubs.kist.re.kr/handle/201004/88201

Appears in Collections:

KIST Conference Paper > Others

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