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dc.contributor.authorOH TAEKYUNG-
dc.contributor.authorHyunsu Ju-
dc.contributor.authorHyengtag Jeon-
dc.contributor.authorLee, Jeon Kook-
dc.date.accessioned2024-01-12T13:38:50Z-
dc.date.available2024-01-12T13:38:50Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/88201-
dc.languageEnglish-
dc.publisherMaterials Research Society, 4.17~21, Arizona-
dc.subjectMoS2-
dc.subject2 dimensional materials-
dc.subjectoff axis sputtering-
dc.subjectepitaxial growth-
dc.titleSynthesis of large area MoS2 few layers by RF sputtering process-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitation2017 MRS Spring Meeting-
dc.citation.title2017 MRS Spring Meeting-
dc.citation.conferencePlaceUS-
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