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Large area carbon membrane splitting from single diamond bulk substrate by using carbon and hydrogen co-implantation

Authors

SUK JEA KOUN; Jiwon Yune; LIM, WEON CHEOL; Moon, Sung Wook; Joon Kon Kim; Jaeyong Lee; SONG, JONG HAN

Publisher

8.21~26, 부산

Citation

International Vacuum Congress (IVC-20)

URI

https://pubs.kist.re.kr/handle/201004/88336

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KIST Conference Paper > Others

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