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원자층 증착법을 이용한 주석 칼코게나이드 2차원 박막의 영역 선택적 증착 방법

Author

임재균; 장지수; 허성훈; 윤정호; 김성근; 백승협; 최지원; 강종윤; 김진상; 송현철

Assignee

한국과학기술연구원

Regitration Date

2023-07-14

Registration No.

10-2557055-0000

Application Date

2022-10-12

Application No.

10-2022-0130932

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/88438

Appears in Collections:

KIST Patent > 2022

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