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나노 인덴터를 위한 기체 교환 장치

Author

김소희; 홍지현; 백우석; 강인영; 안재평

Assignee

한국과학기술연구원

Regitration Date

2022-06-23

Registration No.

10-2413749-0000

Application Date

2020-08-13

Application No.

10-2020-0101573

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/88494

Appears in Collections:

KIST Patent > 2020

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