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정전용량형 미세가공 초음파 트랜스듀서

Author

이병철; 이활; 최리노

Assignee

한국과학기술연구원

Regitration Date

2020-12-22

Registration No.

10-2196437

Application Date

2019-01-29

Application No.

10-2019-0011480

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/88614

Appears in Collections:

KIST Patent > 2019

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