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Optimization of High Harmonic Generation of Coherent EUV Light for EUV Metrology: Simulations and Experiments

Authors

Jung Min Ki; Yong Soo Kim; Kim Younghee; Kim, Yong Tae; Hamin Sung; Jomsool Kim; Ju Han Lee; Jhon, Young Min

Publisher

11.8~11, 교토

Citation

International Microprocesses and Nanotechnology Conference 2016, v.11P-11-98L

Keywords

High Harmonic Generation; EUV

URI

https://pubs.kist.re.kr/handle/201004/88853

Appears in Collections:

KIST Conference Paper > Others

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