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Fabrication of CMUTs with Substrate-embedded Springs

Authors

Lee, Byung Chul; Amin Nikoozadeh; Kwan Kyu Park; Butrus T. Khuri-Yakub

Citation

IEEE International Ultrasonics Symposium 2013, pp.1733 - 1736

URI

https://pubs.kist.re.kr/handle/201004/89453

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KIST Conference Paper > Others

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