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입방정질화붕소 박막 제조방법 및 이를 통해 제조된 입방정질화붕소 박막 구조물

Author

박종극; 백영준; 이욱성

Assignee

한국과학기술연구원

Regitration Date

2014-10-07

Registration No.

8852406

Application Date

2013-01-18

Application No.

13/744557

Country

US

URI

https://pubs.kist.re.kr/handle/201004/89667

Appears in Collections:

KIST Patent > 2013

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