KIST Library Institutional Repository

마스크 패턴 검사용 광선 자동차단 영상 획득 시스템 및 그 방법

Author

전영민; 장지웅; 박민철; 김선호; 이택진; 이석; 변영태; 김재헌; 우덕하

Assignee

한국과학기술연구원

Regitration Date

2013-06-17

Registration No.

10-1277698

Application Date

2012-02-22

Application No.

2012-0017765

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/89696

Appears in Collections:

KIST Patent > 2012

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