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저온공정용 유전체 박막 및 그 제조방법

Author

최지원; 윤석진; 김윤회; 강종윤; 장호원; 김진상

Assignee

한국과학기술연구원

Regitration Date

2013-01-02

Registration No.

10-1219474

Application Date

2011-05-24

Application No.

2011-0048804

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/89732

Appears in Collections:

KIST Patent > 2011

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