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Role of restrained vertical growth in realizing one-step maskless selective epitaxy on patterned GaAs substrate

Title
Role of restrained vertical growth in realizing one-step maskless selective epitaxy on patterned GaAs substrate
Authors
손창식; 박영균; 김성일; 김은규; 최인훈
Keywords
one-step maskless selective epitaxy; selective epitaxy; GaAs; metalorganic chemical vapor deposition
Issue Date
1998-10
Publisher
한국물리학회 회보; Bulletin of the Korean Physical Society
Citation
VOL 16, NO 2, 476-476
URI
https://pubs.kist.re.kr/handle/201004/8982
Appears in Collections:
KIST Publication > Conference Paper
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