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dc.contributor.author백경갑-
dc.contributor.author주병권-
dc.contributor.author김희중-
dc.contributor.author오명환-
dc.date.accessioned2015-12-02T03:08:37Z-
dc.date.available2015-12-02T03:08:37Z-
dc.date.issued199810-
dc.identifier.citation, 102-110-
dc.identifier.other8627-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/8983-
dc.publisher전자부품-
dc.publisherThe Electronic Parts & Components Monthly-
dc.subjectMEMS-
dc.title의료분야의 초소형 정밀기계-
dc.typeOther-
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