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실리콘 함유 다이아몬드상 카본 박막, 그 제조방법 및 용도

Author

문명운; 김해리; 이진우; 이광렬

Assignee

한국과학기술연구원

Regitration Date

2015-03-06

Registration No.

5706330

Application Date

2010-06-15

Application No.

2011-535501

Country

JA

URI

https://pubs.kist.re.kr/handle/201004/89845

Appears in Collections:

KIST Patent > 2010

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