MEMS용 폴리머 선형 엑츄에이터 및 이를 이용한 뇌 신경신호 측정장치의 마이크로 매니퓰레이터

Author
박석호김진석홍주희양성욱신희섭김기선이석찬김희수윤의성최일환이동원
Assignee
한국과학기술연구원
Regitration Date
2014-07-08
Registration No.
8,774,910
Application Date
2011-01-31
Application No.
13/017,336
Country
US
URI
https://pubs.kist.re.kr/handle/201004/90282
Appears in Collections:
KIST Patent > 2011
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