DSpace at KISTKIST Conference PaperOthers

Full metadata record

DC Field Value Language
dc.contributor.authorKim Yong Soo-
dc.contributor.authorKim Younghee-
dc.contributor.authorPark June-
dc.contributor.authorHamin Sung-
dc.contributor.authorJomsool Kim-
dc.contributor.authorJu Han Lee-
dc.contributor.authorJhon, Young Min-
dc.date.accessioned2024-01-12T15:34:42Z-
dc.date.available2024-01-12T15:34:42Z-
dc.date.created2021-09-29-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/90467-
dc.languageEnglish-
dc.publisherOSA-
dc.subjectEUV-
dc.subjectCoherent-
dc.subjectHHG-
dc.subjectfs Laser-
dc.titleCharacteristics of the Coherent EUV Light Source for EUV Metrology-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationConference on Laser and Electro-Optics Pacific Rim(CLEO-PR), v.25B2-3, pp.1 - 2-
dc.citation.titleConference on Laser and Electro-Optics Pacific Rim(CLEO-PR)-
dc.citation.volume25B2-3-
dc.citation.startPage1-
dc.citation.endPage2-
dc.citation.conferencePlaceUS-
Appears in Collections:
KIST Conference Paper > Others
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML
Show Simple Item Record

qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE