MEMS 구조물을 이용한 탄소나노튜브 가스센서 및 그 제작방법

Author
주병권이덕중이곤재오동환강종윤이윤희장윤택문승일이종홍
Assignee
한국과학기술연구원
Regitration Date
2005-12-09
Registration No.
0537093
Application Date
2003-10-02
Application No.
2003-0068792
Country
KO
URI
https://pubs.kist.re.kr/handle/201004/90702
Appears in Collections:
KIST Patent > 2003
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