미소 전자 기계 구조의 발전기

Author
김광호송귀은전재학이윤표
Assignee
한국과학기술연구원
Regitration Date
2004-06-15
Registration No.
6,750,596
Application Date
2002-09-13
Application No.
10/243,195
Country
US
URI
https://pubs.kist.re.kr/handle/201004/90716
Appears in Collections:
KIST Patent > 2002
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