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금속이온을　포함하는　플라즈마를　이용한　금속박막　형성방법

Author

송종한; 김태곤; 양정수; 최원국; 황정남

Assignee

한국과학기술연구원

Regitration Date

2002-08-21

Registration No.

351197

Application Date

2000-08-11

Application No.

00-46490

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/90792

Appears in Collections:

KIST Patent > 2000

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