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박막　증착　장치

Author

장홍규; 최원국; 정형진; 고석근

Assignee

한국과학기술연구원

Regitration Date

1999-01-05

Registration No.

5,855,683

Application Date

1997-02-07

Application No.

08/797,255

Country

US

URI

https://pubs.kist.re.kr/handle/201004/90973

Appears in Collections:

KIST Patent > Others

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