KIST Library Institutional Repository

대면적　산화물　박막　형성장비의 샤워헤드

Author

이전국

Assignee

한국과학기술연구원

Regitration Date

2002-07-30

Registration No.

348587

Application Date

1999-01-28

Application No.

99-2743

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/91335

Appears in Collections:

KIST Patent > Others

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