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정전용량형 미세가공 초음파 트랜스듀서 및 그 제조방법

Author

이병철; 김태송; 박진수; 강동현

Assignee

한국과학기술연구원

Regitration Date

2020-11-17

Registration No.

10-2182063

Application Date

2019-03-20

Application No.

10-2019-0031852

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/91544

Appears in Collections:

KIST Patent > 2019

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