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dc.contributor.author이병철-
dc.contributor.author김태송-
dc.contributor.author박진수-
dc.contributor.author강동현-
dc.date.accessioned2024-01-12T16:33:17Z-
dc.date.available2024-01-12T16:33:17Z-
dc.date.issued2020-11-17-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/91544-
dc.title정전용량형 미세가공 초음파 트랜스듀서 및 그 제조방법-
dc.typePatent-
dc.date.registration2020-11-17-
dc.date.application2019-03-20-
dc.identifier.patentRegistrationNumber10-2182063-
dc.identifier.patentApplicationNumber10-2019-0031852-
dc.publisher.countryKO-
dc.type.iprs특허-
dc.contributor.assignee한국과학기술연구원-
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KIST Patent > 2019
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