KIST Library Institutional Repository

백금족 박막의 원자층 증착 방법

Author

김성근; 정두석; 권범진; 편정준; 강종윤; 최지원; 김진상; 백승협

Assignee

한국과학기술연구원

Regitration Date

2016-08-22

Registration No.

10-1651512

Application Date

2015-06-01

Application No.

2015-0077138

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/92092

Appears in Collections:

KIST Patent > 2015

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