KIST Library Institutional Repository

반도체 소자의 금속배선 및 그 제조방법

Author

김영환; 김춘근; 김성일; 김용태

Assignee

한국과학기술연구원

Regitration Date

2013-09-06

Registration No.

1307780

Application Date

2012-02-16

Application No.

2012-0015689

Country

KO

URI

https://pubs.kist.re.kr/handle/201004/92615

Appears in Collections:

KIST Patent > 2012

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